JPH0443668Y2 - - Google Patents
Info
- Publication number
- JPH0443668Y2 JPH0443668Y2 JP13911987U JP13911987U JPH0443668Y2 JP H0443668 Y2 JPH0443668 Y2 JP H0443668Y2 JP 13911987 U JP13911987 U JP 13911987U JP 13911987 U JP13911987 U JP 13911987U JP H0443668 Y2 JPH0443668 Y2 JP H0443668Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve body
- flange
- valve
- pressure regulating
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001105 regulatory effect Effects 0.000 claims description 19
- 239000007789 gas Substances 0.000 description 8
- 238000012423 maintenance Methods 0.000 description 5
- 239000007795 chemical reaction product Substances 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13911987U JPH0443668Y2 (en]) | 1987-09-11 | 1987-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13911987U JPH0443668Y2 (en]) | 1987-09-11 | 1987-09-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6443280U JPS6443280U (en]) | 1989-03-15 |
| JPH0443668Y2 true JPH0443668Y2 (en]) | 1992-10-15 |
Family
ID=31402082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13911987U Expired JPH0443668Y2 (en]) | 1987-09-11 | 1987-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0443668Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH700100B1 (de) * | 2008-12-12 | 2013-02-28 | Inficon Gmbh | Ventil. |
-
1987
- 1987-09-11 JP JP13911987U patent/JPH0443668Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6443280U (en]) | 1989-03-15 |
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